Key features & benefits
QC for multi- and c-Si based solar cell manufacturing
The SENperc PV is designed for quality control in PERC solar cell manufacturing. It measures SiO2, Al2O3, and SiNX single films and layer stacks that are used for front side ant-reflection and for back side passivation of PERC cells (multi- and c-Si substrates). The stability of the deposition process is monitored over a long period of time. Thereby, maintenance intervals are optimized.
Thickness and refractive index measurement of Al2O3 and SiNx films
The SENperc PV comes with recipe based push-button operation for QC. A PERC cell is placed with the coated back side down on the sample table to control passivation layers. Textured crystalline Si solar cells are inserted into a special wafer mount for analyzing AR coating. No alignment is required. Stray light does not influence the measurement. Thickness and refractive index are measured and saved to the SQL database.
Long term stability monitoring of SiO2, Al2O3 and SiNx deposition
Statistical process control (SPC) is applied to evaluate the PERC solar cell. Preset ranges are applied for yield analysis. Direct and long-term feedback is provided to the operator for immediate intervention. The SQL database is permanently accessible locally as well as via LAN to support cell tracking and yield analysis. In addition to push-button operation, the SENpercPV is equipped with a powerful software interface for R&D of new recipes.
Quality control of large-area glass and foil substrates is critical in industries such as display production, photovoltaics, and functional coatings, such as transparent conductive oxides (TCO). Substrate defects or thin film variations can compromise entire assemblies, making early and precise QC essential. The SENTECH SENsol platform provides a dedicated solution for accurate, application-driven measurement of these challenging materials.
Flexibility and modularity
Quality control of large glass and foil substrates plays a crucial role in industries like display manufacturing, photovoltaics, and functional coatings. Even minor substrate defects or inconsistencies can jeopardise entire assemblies, which makes early and precise QC indispensable. The SENTECH SENsol platform delivers a tailored solution for reliable, application-focused measurement of these demanding materials. Large substrates are often heavy, fragile, or flexible. The SENsol’s horizontal measurement configuration ensures safe handling and avoids bending or sagging that could distort results. This orientation also enables seamless integration with conveyor-based in-line QC, supporting high-throughput manufacturing. To deliver reliable process feedback, SENsol combines mapping which identifies coating uniformity, local defects, absorption, and particulate contamination. The system verifies optical performance, ensuring consistent light throughput and detecting haze or absorption. It delivers dimensional accuracy measurements that confirm thickness and flatness, ensuring compatibility with downstream assembly and processing. Together, these measurements give a complete picture of substrate quality, supporting both R&D and production QC of e.g. TCO films.
Every production line has unique demands. That’s why the SENTECH SENsol is engineered as a flexible measurement platform, adaptable to different substrate sizes, materials, and QC workflows. Whether in R&D or small-scale production, SENsol delivers precise, reliable, and scalable QC.
Configurations:
- A spectral extension of specular reflection into the NIR is available for the SENTECH SENsol.
