Experts in Thin Film Metrology
What is ellipsometry?
Ellipsometry is your go-to technique for measuring the change in light polarisation when it bounces off or passes through a material. It delivers two key pieces of info: the amplitude ratio (Ψ) and the phase difference (Δ), which together reveal the film’s thickness and optical constants. But that’s just the start, ellipsometry can also tell you about a material’s composition, crystallinity, surface roughness, and even doping levels.
This technique has exploded in popularity, especially with its ability to measure ultra-thin films at the nanometer scale which is critical in fields like microelectronics. Today, it’s an indispensable tool in research for the semiconductor industry whether it’s dielectrics, metals or superconductors, ellipsometry can handle it all.
Spectroscopic
ellipsometry
Gain valuable insight into the optical properties of your thin films and surfaces using our non-destructive spectroscopic ellipsometry range of tools.
Laser
ellipsometry
Leverage the unique properties of laser light for high-precision and high-sensitivity measurements of your thin films and surfaces with our laser ellipsometry tools.
Spectroscopic
reflectometry
Determine valuable information about the material properties of your thin films including refractive index and thickness using our durable reflectometry tools.
Metrology
for quality control
Our QC tools ensure the accuracy, reliability, and precision of measurements you need for obtaining accurate data, reproducible results, uniform and consistent measurements for robust and meaningful statistical process control.
In-situ metrology /
endpoint detection
Use our tools to avoid defects or layer damage while increasing time and resource efficiency with uninterrupted real-time measurement, characterisation, and endpoint detection of your materials or processes in their natural environment.
