Plasma Process Technology
and Thin Film Metrology

Discover SENTECH, a leading provider of low-damage plasma process systems and thin film metrology tools for semiconductor research and industry.

Explore Our Products

Visit our comprehensive product overview, to learn more about the latest developments in plasma process technology systems and thin film metrology tools from SENTECH.

Plasma Process Technology​

Discover the reliable, durable, and versatile low-damage plasma etch and deposition systems from SENTECH.​

Thin Film Metrology

Explore the thin film metrology tools designed to deliver repeatable, consistent, and accurate results.​

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Upcoming Events

4-7 August 2024

ALD/ALE

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11-13 September 2024

CIOE 2024

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Working at SENTECH

Located in Germany’s leading science and technology park Adlershof in Berlin, SENTECH Instruments has become one of the world market leaders in equipment production for plasma process tehcnology and thin film metrology. Click on “Careers” to see a full list of our current vacancies.