Plasma Process Technology
and Thin Film Metrology

Discover SENTECH, a leading provider of low-damage plasma process systems and thin film metrology tools for semiconductor research and industry.
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Explore Our Products

Visit our comprehensive product overview, to learn more about the latest developments in plasma process technology systems and thin film metrology tools from SENTECH.

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Plasma Process Technology​

Discover the reliable, durable, and versatile low-damage plasma etch and deposition systems from SENTECH.​

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Thin Film Metrology

Explore the thin film metrology tools designed to deliver repeatable, consistent, and accurate results.​

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Upcoming Events

30 August - 01 September

The 10th International Conference on Nanoscience and Technology, China (ChinaNANO 2025)

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02 - 04 September 2025

SEMICON INDIA 2025

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10 - 12 September 2025

CIOE 2025

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Working at SENTECH

Located in Germany’s leading science and technology park Adlershof in Berlin, SENTECH Instruments has become one of the world market leaders in equipment production for plasma process technology and thin film metrology. Click on “Careers” to see a full list of our current vacancies.