Sprectrscopic Ellipsometry
What are the advantages of spectroscopic ellipsometry?
Spectroscopic ellipsometry is a powerful technique for thin-film and ultra-thin film measurement due to its non-destructive, highly precise, and versatile nature. It measures the change in polarisation of light as it reflects off a thin film, providing detailed information about the film’s thickness, refractive index, and optical properties across a wide spectral range.