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Thin Film Metrology
SENTECH thin film metrology tools for repeatable and accurate results
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Thin Film Metrology
In-situ Metrology / Endpoint Detection
Find the best tools in in-situ monitoring for process controlled and fast, efficient, process development and optimisation.
AL Real Time Monitor
The SENTECH
AL Real Time Monitor
is a proven optical diagnostic tool allowing fast process […]
Laser Ellipsometer for in-situ measurement – SE 401adv
In-situ sub-angstrom precision measurement of ultra-thin, single-layer films. […]
Laser-based interferometric EPD – SLI
The SENTECH SLI Laser Interferometer for process monitoring and endpoint detection is the perfect partner […]
SENresearch 4.0
for in-situ measurement – Spectroscopic Ellipsometers
The SENTECH
SENresearch 4.0
in-situ spectroscopic ellipsometers (SER 801 and SER 801 DUV) are measurement […]
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Spectroscopic Ellipsometry
Laser Ellipsometery
Spectroscopic Reflectometry
Metrology for quality control
News
Revolutionising Photonics: A Path to Affordable, Quantum-Enhanced Optical Components
Learn more about “Projekt MEXSIQUO”
OptiRefS Project
Learn more about the OptiRefS project
The SENTECH Thin Film Metrology Seminar and Workshop 2024
Read about our cutting-edge thin film metrology seminar and workshop!
Successful Characterisation of Dielectric Layers on SiC for Next-Gen Semiconductor Applications
Explore our latest research and request the full application note.
Wafer-level integration challenges of ALD for 2D materials
Find out about the collaboration between SENTECH and the Ruhr-Universität Bochum (RUB).
Analysing the earth’s heat balance to better understand global warming
The European Space Agency's satellite mission planned for 2027.
