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Thin Film Metrology
SENTECH thin film metrology tools for repeatable and accurate results
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Thin Film Metrology
In-situ Metrology / Endpoint Detection
Find the best tools in in-situ monitoring for process controlled and fast, efficient, process development and optimisation.
Al Real Time Monitor Laser Ellipsometer
The SENTECH
AL Real Time Monitor
is a proven optical diagnostic tool allowing fast process […]
SE 401adv In-Situ Laser Ellipsometer
In-situ sub-angstrom precision measurement of ultra-thin, single-layer films. […]
SLI Laser-Based Interferometric EPD
The SENTECH SLI Laser Interferometer for process monitoring and endpoint detection is the perfect partner […]
SENresearch 4.0
In-Situ Spectroscopic Ellipsometer
The SENTECH
SENresearch 4.0
in-situ spectroscopic ellipsometers (SER 801 and SER 801 DUV) are measurement […]
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Spectroscopic Ellipsometry
Laser Ellipsometery
Spectroscopic Reflectometry
Metrology for quality control
News
Leadership Announcement at SENTECH
Strengthened leadership team announced
Global Collaboration in Action!
SENTECH Distributor Meeting 2025
SENTECH Plasma Process Technology Seminar 2025
See full agenda
Honouring the Life and Legacy of Dr. Helmut Witek
Revolutionising Photonics: A Path to Affordable, Quantum-Enhanced Optical Components
Learn more about “Projekt MEXSIQUO”
OptiRefS Project
Learn more about the OptiRefS project
