In-situ Metrology / Endpoint Detection

Find the best tools in in-situ monitoring for process controlled and fast, efficient, process development and optimisation.

AL Real Time Monitor

The SENTECH AL Real Time Monitor is a proven optical diagnostic tool allowing fast process […]

Laser Ellipsometer for in-situ measurement – SE 401adv

In-situ sub-angstrom precision measurement of ultra-thin, single-layer films. […]

Laser-based interferometric EPD – SLI

The SENTECH SLI Laser Interferometer for process monitoring and endpoint detection is the perfect partner […]

SENresearch 4.0 for in-situ measurement – Spectroscopic Ellipsometers

The SENTECH SENresearch 4.0 in-situ spectroscopic ellipsometers (SER 801 and SER 801 DUV) are measurement […]

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Spectroscopic Ellipsometry

Laser Ellipsometery

Spectroscopic Reflectometry

Metrology for quality control

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OptiRefS Project

Learn more about the OptiRefS project

The SENTECH Thin Film Metrology Seminar and Workshop 2024

Join us for a cutting-edge thin film metrology seminar and workshop!

Successful Characterisation of Dielectric Layers on SiC for Next-Gen Semiconductor Applications

Explore our latest research and request the full application note.

Wafer-level integration challenges of ALD for 2D materials

Find out about the collaboration between SENTECH and the Ruhr-Universität Bochum (RUB).

Analysing the earth’s heat balance to better understand global warming

The European Space Agency's satellite mission planned for 2027.

The SENTECH “Plasma Process Technology Seminar” 2024

Click here to find out more about the SENTECH Plasma Process Technology Seminar.