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Thin Film Metrology
SENTECH thin film metrology tools for repeatable and accurate results
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Thin Film Metrology
In-situ Metrology / Endpoint Detection
Find the best tools in in-situ monitoring for process controlled and fast, efficient, process development and optimisation.
Al Real Time Monitor Laser Ellipsometer
The SENTECH
AL Real Time Monitor
is a proven optical diagnostic tool allowing fast process […]
SE 401adv In-Situ Laser Ellipsometer
In-situ sub-angstrom precision measurement of ultra-thin, single-layer films. […]
SLI Laser-Based Interferometric EPD
The SENTECH SLI Laser Interferometer for process monitoring and endpoint detection is the perfect partner […]
SENresearch 4.0
In-Situ Spectroscopic Ellipsometer
The SENTECH
SENresearch 4.0
in-situ spectroscopic ellipsometers (SER 801 and SER 801 DUV) are measurement […]
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Spectroscopic Ellipsometry
Laser Ellipsometery
Spectroscopic Reflectometry
Metrology for quality control
News
SENTECH Plasma Process Technology Seminar 2026 – Save the Date!
The SENTECH Plasma Seminar returns in 2026, dates now confirmed
Processing Silicon Carbide (SiC), Understanding the Challenges and Finding Pathways to Precision
Read our latest article about SiC processing and characterisation
SENTECH Instruments and PVA TePla Launch Next-Generation LuXpector THEA at SEMICON Europa 2025
Learn more about the LuXpector THEA
Understanding ALE, When is Atomic Layer Etching the answer?
Read our latest article about atomic layer etching
Success at the SENTECH Thin Film Metrology Workshop 2025
The power of ellipsometry, transmission, and reflectometry, learn more
SENTECH at EUROnanoLAB 2025 CVD & ALD Workshop
Learn more about our recent visit
