Spectroscopic ellipsometry software SpectraRay/4



Measurement parameters may be simulated as function of wavelength, photon energy, reciprocal centimeter, angle of incidence, time, temperature, thin film thickness measurement, and other parameters.


The mapping option of our spectroscopic ellipsometry features predefined or user defined patterns, extensive statistics, and graphical display of data as 2D color, gray, contour, +/- deviation from mean value and 3D plot.

  • Setting measurement parameters and starting thin film thickness measurement
  • Building a model by drag and drop from a materials library or from already existing dispersion models
  • Defining and varying parameters to fit the calculated spectra to the measured spectra
  • Interactively improving the model for best figure of merit
  • Reporting the results as a word document by selecting from predefined or customized templates
  • Saving all experimental data, the protocol, and comments in one experiment file

The advantage of SpectraRay/4 recipe mode is a two step action:

  • Selection and
  • Execution of predefined recipes from a library.

The recipes comprise thickness measurement parameters, models, fitting parameters, and reporting templates.


SpectraRay/4, the SENTECH proprietary spectroscopic ellipsometry software, includes data acquisition, modeling, fitting, and extended reporting of ellipsometric, reflection, and transmission data. It supports variable angle, multi-experiment, and combined photometric measurements. SpectraRay/4 includes a huge library of materials data based on SENTECH thickness measurements and literature data as well. The large number of dispersion models allows modeling of nearly any type of material.

SpectraRay/4 provides a user-friendly workflow oriented interface to operate SENTECH spectroscopic ellipsometry tools and a comprehensive set of tools to model, fit, and represent ellipsometric data. The user interface incorporates a recipe oriented operation for operators and an advanced mode for interactive measurement and modeling.

SpectraRay/4 features uniaxial and biaxial anisotropic material measurements, thin film thickness measurement, and the measurement of layers. The software treats sample effects like depolarization, non-uniformity, scattering (Mueller-matrix), and backside reflection.

SpectraRay/4 includes all utilities of general spectroscopic ellipsometry software package for data import and export (ASCII included), file management, arithmetic manipulations of spectra, display, printing, and reporting (in Word file format *.doc). The scripting capability makes it very flexible to automate routine measurements, tailor it for demanding applications, and control third party hardware like sensors, heating stage, sample cell or cryostat.

Documents   To get more information, please click here.

Documents   To get more information, please click here.