Berlin, 28.07.2015

SENTECH Seminar on Ellipsometry and Reflectometry 2015


A one day seminar on the topic “Ellipsometry and Reflectometry for the characterization of thin films” was organized by SENTECH in Stuttgart, June 18, 2015. The seminar was focussed on innovations of SENTECH metrology as well as on new developments in science and technology. Invited speakers and SENTECH experts addressed topics from in situ process control, over nanotechnology to photovoltaics.

The talks included guest speakers from different universities and institutions. One of the numerous highlights was the presentation on the topic “In situ measurements in gas environment with ellipsometry” by Brecht Vallaey, University Leuven. He showed how to apply in situ characterizations for different kinds of gases with spectroscopic ellipsometry.

Particularly interesting were the presentations on optical characterization of nanostructured surfaces by Bernd Bodermann from PTB and Ingo Dirnstorfer from Namlab. They showed how to determinate structure parameters from gratings using ellipsometry and special software extensions.

Sessions given by SENTECH experts focussed, for example, on the new SENTECH ALD Real Time Monitor. Dr Kärkkänen, ALD specialist at SENTECH, presented on the effective optimization of ALD processes parameters using the ALD Real Time Monitor.

After the seminar speakers and audience got together for networking and discussion about practical applications and techniques. The SE 800 PV, the SENTECH spectroscopic ellipsometer for photovoltaic research and engineering applications, was demonstrated in a hands-on-ellipsometry. The event created an excellent opportunity for all attendants to share their practical experiences and to network.

Wolfgang Wagenseil, Sales Manager at SENTECH organized this event. He was delighted by the excellent feedback of the participants: “The participants got to know more about the recent advances of charactering materials with SENTECH ellipsometry and reflectometry. They especially enjoyed an intensive discussion about the given presentations afterwards. This will eventually help them to improve their work and researches in the future.” If you want to learn more about upcoming SENTECH seminars contact us here!