QC for solar cell manufacturing SENperc PV

SENperc thickness measurement

QC for multi- and c-Si based solar cell manufacturing

The SENperc PV is designed for quality control in PERC solar cell manufacturing. It measures SiO2, Al2O3, and SiNX single films and layer stacks that are used for front side ant-reflection and for back side passivation of PERC cells (multi- and c-Si substrates). The stability of the deposition process is monitored over a long period of time. Thereby, maintenance intervals are optimized.

Thickness and refractive index measurement of Al2O3 and SiNx films

The SENperc PV comes with recipe based push-button operation for QC. A PERC cell is placed with the coated back side down on the sample table to control passivation layers. Textured crystalline Si solar cells are inserted into a special wafer mount for analyzing AR coating. No alignment is required. Stray light does not influence the measurement. Thickness and refractive index are measured and saved to the SQL database.

Long term stability monitoring of SiO2, Al2O3 and SiNx deposition

Statistical process control (SPC) is applied to evaluate the PERC solar cell. Preset ranges are applied for yield analysis. Direct and long-term feedback is provided to the operator for immediate intervention. The SQL database is permanently accessible locally as well as via LAN to support cell tracking and yield analysis. In addition to push-button operation, the SENpercPV is equipped with a powerful software interface for R&D of new recipes.