What's New?


Last week SENTECH together with China Sentech Sales Office have successfully conducted plasma seminars in Shenzhen and Wuhan. Shenzhen and Wuhan are important centers for the manufacturing of optoelectronic and sensor devices. The growing number of many start-up’s and the activities established companies and institutes make these locations particular interesting for SENTECH products. →read more

Topping out ceremony SENTECH

SENTECH Instruments GmbH celebrates the topping-out ceremony for a new building. The new facilities are built to increase production warehouse and administration area. SENTECH was celebrating the ceremony in the Science and Technology Park Berlin Adlershof on July 17, 2019. →read more

ICP-RIE Plasma Etching:

Plasma_cryogenicSiPlasma_lithographyPlasma etching result of VCSEL structure using Ar-Cl2 gas mixtureEtching process result of Si-DRIE (SF6-C4F8-O2) post O2 cleanPlasma etching result of SF6-C4F8 based gas chopping process(IAP-Jena)ICP PECVD TEOS SiO2 film step coverage over Si ridge(IISB-Erlangen)ICP RIE result of SF6O2-C4F8-based Si gas chopping process

Upcoming Events:


Instruments GmbH

Schwarzschildstr. 2
12489 Berlin

Phone: +49 (0)30 63 92 55 20
Fax: +49 (0)30 63 92 55 22
Email: info@sentech.de

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German sales office:


Chinese sales office:

Worldwide sales partners:
→ SENTECH Distributor NetworklinkMG