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SENTECH veranstaltet ein anwendungsorientiertes Seminar zum Thema „Ellipsometrie und Reflektometrie zur Qualitätskontrolle dünner Schichten“ in Berlin-Adlershof. Das Seminar ist ausgebucht, Anmeldungen können für die darauffolgende Veranstaltung vorgenommen werden. Auch in diesem Jahr werden kompetente Referenten  Ihnen an ausgewählten Beispielen die Anwendungsmöglichkeiten der optischen Messtechniken Ellipsometrie und Reflektometrie von SENTECH erläutern. →weiter

What's New?

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SENTECH, a specialist in plasma etching, plasma deposition, atomic layer deposition and insitu measurement methods, presented the newest results in etching silicon and III-V compounds, in depositing dielectric films for device passivation by ICPECVD, in ALD for optical and high frequency device applications as well as in advanced automation. →read more

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SENTECH took part in the world’s largest photovoltaics exhibition “SNEC”, hold from May 28-30 in Shanghai, China. Information were given about the next generation of the SENperc PV, the well-known laser ellipsometer SE 400adv PV as well as on the measurement tool SenSol for large CIGS thin film solar cells.  →read more

ICP-RIE Plasma Etching:

Plasma_cryogenicSiPlasma_lithographyPlasma etching result of VCSEL structure using Ar-Cl2 gas mixtureEtching process result of Si-DRIE (SF6-C4F8-O2) post O2 cleanPlasma etching result of SF6-C4F8 based gas chopping process(IAP-Jena)ICP PECVD TEOS SiO2 film step coverage over Si ridge(IISB-Erlangen)ICP RIE result of SF6O2-C4F8-based Si gas chopping process

Upcoming Events:

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SENTECH
Instruments GmbH

Schwarzschildstr. 2
12489 Berlin
Germany

Phone: +49 (0)30 63 92 55 20
Fax: +49 (0)30 63 92 55 22
Email: info@sentech.de

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German sales office:
SENTECH GmbH

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Chinese sales office:
SENTECH China


Worldwide sales partners:
→ SENTECH Distributor NetworklinkMG