ICP-RIE Plasma Etching:
SEMICON Europa 2012
Oct 09, 2012 - Oct 11, 2012
SENTECH Instruments GmbH
Schwarzschildstraße 2, 12489 Berlin, Germany
Phone: +49 30 6392 5520
Fax: +49 30 6392 5522
E-mail: info@sentech.de
German sales office: SENTECH GmbH
Web: www.sentech-sales.de
Worldwide sales offices:
SENTECH Distributor Network
Laser Endpoint Monitoring
Perfect synergy of optical measuring and plasma technology
- in-house developed laser monitor
- time-dependent measurement of reflected intensity
- precise monitoring of the etching or deposition process
- perfectly fitted for SENTECH plasma systems
