Spectroscopic Reflectometry


The spectroscopic reflectometer RM 1000/2000 features UV to NIR spectral range from 200 nm – 930 nm. The optical layout is optimized for light throughput for reliable measurements of n and k even on rough or curved surfaces. Precise height and tilt adjustment leads to accurate single beam reflectance measurements, stable day after day. Details for RM 1000/2000 here!


The FTPadv is a cost-effective table top solution for spectroscopic reflectometry which features very quick thickness measurements. A measurement is performed in less than 100 ms with a precision of lower than 0.3 nm and film thickness range of 50 nm – 25 µm. A broad range of predefined recipes is included for easy spectroscopic reflectometry operation. Details for FTPadv here!


The spectroscopic reflectometry software FTPadv Expert is especially designed for measuring and analysing R(λ) and T(λ). Spectral data analyses for determining thin film thickness, extinction coefficient or refractive index of various materials are implemented into the SENTECH spectroscopic reflectometry software, enabling the material description and fitting by parameters as given by Cauchy dispersion, Drude oscillators and many more. Details for FTPadv expert here!