Comprehensive thin film measurement software FTPadv Expert
Measurement of n, k, and thickness
The software package is designed for advanced analysis of R(λ) and T(λ) measurements.
Multiple layer analysis
Thin Film thickness and refractive index of single films and each layer of a layer stack can be measured.
Large number of dispersion models
Integrated dispersion models are used to describe the optical properties of all common materials. Calculated spectra are adjusted to measured spectra by varying model parameters using fast fitting algorithm.
SENTECH FTPadv Expert software package for advanced analysis of spectral data determines thin film thickness, refractive index, and extinction coefficient based on reflection and transmission measurements. It expands the standard software package of the thin film thickness probe FTPadv for more complex applications including materials of unknown or non-constant optical properties. Thin film thickness, refractive index, and extinction coefficient of single transparent or semitransparent films on smooth or rough, transparent or absorbing substrates can be measured. The software allows the analysis of complex layer stacks, the parameters of each layer of the stack can be determined.
The FTPadv Expert thin film measurement software features the user-friendly and recipe-oriented operational concept as included in the FTPadv standard software. Optical model with highlighted fitting parameters, measured and calculated reflection spectra, and main results are displayed simultaneously on the operation screen.
The software package comprises a large and extendable material library based on tabulated material files as well as parameterized dispersion models
and others .
The FTPadv Expert software is optionally available for the film thickness probe FTPadv and part of the software package of the reflectometers RM 1000 and RM 2000.