SENresearch
Spectroscopic ellipsometer family for thin film and material characterization in R & D.
Spectral range: 190 – 2500 nm
Spectral range: 190 – 2500 nm
The SENresearch broadband spectroscopic ellipsometer family is designed to meet the requirements in modern research with special emphasis on speed and accuracy for unmatched variety of applications.It provides thin film thickness, refractive index, absorption and related properties like material composition, index gradient, surface and interface roughness as well as anisotropic behavior for multi-layer stacks.
The SENresearch family of spectroscopic ellipsometers allows to treat effects of real world samples like depolarization, non-uniformities, scattering and backside reflection. The SENresearch is operated by SpectraRay II, the comprehensive software for data acquisition, modeling, fitting and reporting of ellipsometric, reflection and transmission data.
Step Scan Analyzer operation mode, super-achromatic monochromator, computer controlled polarizer, fast diode/CCD array detection in the UV-VIS and interferometric modulated detection in the NIR not only adds speed and high signal to noise ratio but also allows to tune ellipsometric data acquisition for highest measurement accuracy for each individual application and within the whole (psi, delta) range of 0-90 deg (psi) and 0 – 360 deg (delta).
The SENresearch family allows to measure the degree of polarization and to compensate for depolarization effects caused by non-uniform samples, rough surfaces, and focusing angles. Anisotropic samples and materials can be analyzed.
The SENresearch family allows to measure the degree of polarization and to compensate for depolarization effects caused by non-uniform samples, rough surfaces, and focusing angles. Anisotropic samples and materials can be analyzed.
SENTECH’s advanced mapping option allows to measure lateral uniformity of complex layer stacks applying full spectra analysis in a short time (min. 5 s per point). The data can be represented as 2D-, 3D- or contour plot using customized mapping patterns. A comprehensive statistics package is available.
Mapping software
The SENresearch family allows to measure reflection and transmission data as well. Combined photometric data can be analyzed using SpectraRay II software.
Also available are a motorized goniometer with a broad range of incident angles (20-90 deg) and a cryostat for temperature dependent measurements.
Mapping software
The SENresearch family allows to measure reflection and transmission data as well. Combined photometric data can be analyzed using SpectraRay II software.
Also available are a motorized goniometer with a broad range of incident angles (20-90 deg) and a cryostat for temperature dependent measurements.
SENresearch specifications:
| Spectral ranges: (* numbers in brackets are optional wavelength extensions) | |
| SE 800: | 240 – 950 nm |
| SE 850: | 240 – 1700 (2500) nm |
| SE 800 DUV | 190 – 950 nm |
| SE 850 DUV | 190 – 1700 (2500) nm |
| SE 850 Z | 240 – 1700 nm |
| Polarizer/ analyzer: | motorized, Step Scan Analyzer operation mode |
| Compensator: | super-achromatic |
| Light sources: | Xe arc lamp, Deuterium, Tungsten Halogen (UV-VIS), Tungsten Halogen (NIR) |
| Detection unit: | Photometer with diode array / CCD array (UV-VIS), FT-IR spectrometer (NIR) |
| Sample alignment: | accurate height and tilt adjustment by auto collimating telescope and microscope |
| Sample size: | up to 300 mm wafers |
| Software: | SpectraRay II |
Options:
| Goniometer | motorized, 40-90deg, optional 20-90deg |
| Mapping | motorized, from 50 x 50 mm2 to 300 x 300 mm2 and 300 mm r-theta |
| Micro spots | 200 µm spot size, up to 50 µm on request |
Cryostat | 4 K – 700 K |
| Camera | video camera for sample alignment in lieu of eyepiece, microscopic picture |
| Autofocus | in combination with mapping option |
| Liquid cell | 70deg standard incident angle, optional up to three different incident angles between 50deg and 70deg possible |
Brochure (SENresearch)