Product Overview:

Spectroscopic ellipsometer, laser ellipsometer and reflectometer

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SE800E

  • Spectroscopic ellipsometer
  • Infrared (IR) ellipsometer
  • Variable angle ellipsometer
  • Kinetic ellipsometer
  • Offline / inline measure
  • In-situ / ex-situ measure
  • Small / large area mapping

SE500adv_CER

  • Laser ellipsometer
  • Variable angle ellipsometer
  • In-situ / ex-situ measure
  • Kinetic ellipsometer
  • X-y mapping

FTP_ReinraumApplication

  • Reflectometer
  • Film thickness measure
  • In-situ measurement
  • Large area mapping

Spectroscopic Ellipsometry

Spectral range:     190 nm (DUV) to 25 µm (IR)

      Measurement of:   thickness, refractive index, extinction, ...  more

  • thin film thickness
  • refractive index
  • extinction coefficient
  • reflection
  • transmission
  • anisotropy
  • depolarization
  • scattering (Mueller matrix)
  • surface and interface roughness
  • lateral and vertical material non-uniformities
  • crystal modification
  • composition
  • impurities
  • orientation of organic molecules
  • conductivity
  • doping profiles

      Applications:          optical coatings, solar cells, ...  more

  • optical coatings
  • coatings on glass
  • thin film solar cells
  • crystalline solar cells
  • single films and layer stacks
  • dielectric films
  • thin metallic films
  • semiconductor films
  • organic films
  • bulk materials

Laser Ellipsometry

Highly accurate reference tool for refractive index and film thickness

      Measurement of:   thickness, refractive index, extinction, ...  more

  • thin film thickness
  • refractive index
  • extinction coefficient

      Applications:          AR coatings for PV, single films, ...  more

  • anti-reflective (AR) coatings for crystalline silicon solar cells
  • single films
  • dielectric films
  • thin organic films
  • native oxides
  • double layer stacks
  • bulk materials

SE500_Mapping    RM_Mapping

Reflectometry

Spectral range:     200 nm (DUV) to 2.5 µm (IR)

      Measurement of:   thickness, refractive index, extinction, ...  more

  • reflectance
  • film thickness
  • extinction coefficient
  • refractive index
  • non-uniformity of films on large area samples

      Applications:          photoresists, dielectrics, organics, ...  more

  • photoresists
  • dielectric hard masks
  • organic passivation layers
  • optical filters
  • anti-reflective (AR) coatings
  • coatings on flat or curved samples with smooth or rough surface
  • coatings on medical stents
  • membranes
  • air gap in LCD applications

Documents   To get more information, please click here.

Documents   To get more information, please click here.