Experts in Thin Film Metrology
Advanced Thin Film Metrology Techniques
SENTECH Ellipsometry and Reflectometry tools are used in precision manufacturing and research in the nano and microtechnology and optical semiconductor industries. Accurate characterisation of film thickness, refractive index, and optical constants ensures the performance and reliability of advanced devices.
Understanding ellipsometry
Ellipsometry tools, including spectroscopic ellipsometry and laser ellipsometry, measure the change in polarisation of light reflected from thin film surfaces. This non-destructive optical technique provides detailed information about film thickness, composition, and uniformity at the nanometer scale. Spectroscopic ellipsometry extends the measurement range across multiple wavelengths, offering rich spectral data ideal for complex multilayer structures. Laser ellipsometry, on the other hand, delivers fast, high-precision results suited to process monitoring and real-time control in semiconductor fabrication.
Reflectometry explained
Reflectometry complements ellipsometry by analysing the intensity of reflected light to determine film thickness and optical properties. When combined, ellipsometry and reflectometry create a comprehensive metrology solution that enhances measurement accuracy and expands analytical capability for advanced material systems.
Why is this important for quality control?
In modern quality control (QC) workflows, these optical metrology techniques ensure consistency, detect process deviations, and support yield optimisation in thin film deposition and coating processes. Their precision and non-invasive nature make them ideal for developing next-generation semiconductors, photonic devices, and nanostructured materials.
SENTECH Ellipsometry and Reflectometry tools define the benchmark for thin film characterisation, research and production quality control. Explore our range of tools and systems.
Spectroscopic
ellipsometry
Gain valuable insight into the optical properties of your thin films and surfaces using our non-destructive spectroscopic ellipsometry range of tools.
Laser
ellipsometry
Leverage the unique properties of laser light for high-precision and high-sensitivity measurements of your thin films and surfaces with our laser ellipsometry tools.
Spectroscopic
reflectometry
Determine valuable information about the material properties of your thin films including refractive index and thickness using our durable reflectometry tools.
Metrology
for quality control
Our QC tools ensure the accuracy, reliability, and precision of measurements you need for obtaining accurate data, reproducible results, uniform and consistent measurements for robust and meaningful statistical process control.
- SENDURO accuva 10 - Fully-automated thin film Quality Control
- RM 1000 QC - Automated Spectroscopic Reflectometer for Quality Control
- SENperc PV - Quality Control for Front and Back Side Photovoltaic Manufacturing
- SE 400adv PV - Laser Ellipsometer for Photovoltaic Applications
- SER 800 PV - Spectroscopic Ellipsometer for Photovoltaic Applications
- SENsol - Precision QC for Large Glass and Foil Substrates
In-situ metrology /
endpoint detection
Use our tools to avoid defects or layer damage while increasing time and resource efficiency with uninterrupted real-time measurement, characterisation, and endpoint detection of your materials or processes in their natural environment.
