Comprehensive Thin Film Measurement Software

Key features & benefits

Measurement of n, k, and thickness

The software package is designed for advanced analysis of R(λ) and T(λ) measurements.

Multiple layer analysis

Thin film thickness and refractive index of single films and each layer of a layer stack can be measured.

Large number of dispersion models

Integrated dispersion models are used to describe the optical properties of all common materials. Calculated spectra are adjusted to measured spectra by varying model parameters using a fast-fitting algorithm.

The FTPadv Expert thin film measurement software features the user-friendly and recipe-oriented operational concept as included in the FTPadv standard software. The optical model with highlighted fitting parameters, measured and calculated reflection spectra, and main results are displayed simultaneously on the operation screen.

Flexibility and modularity

The SENTECH FTPadv Expert software package for advanced analysis of spectral data, determines thin film thickness, refractive index, and extinction coefficient based on reflection and transmission measurements. It expands the standard software package of the SENTECH FTPadv thin film thickness probe for more complex applications including materials of unknown or inconstant optical properties. Thin film thickness, refractive index, and extinction coefficient of single transparent or semi-transparent films can be measured on smooth or rough, transparent or absorbing substrates. The software allows the analysis of complex layer stacks, and the parameters of each layer of the stack can be determined.

Our FTPadv Expert thin film measurement software features the user-friendly and recipe-oriented operational concept as included in the FTPadv standard software. The optical model with highlighted fitting parameters, measured and calculated reflection spectra, and main results are displayed simultaneously on the operation screen.

The software package comprises a large and extendable material library based on tabulated material files as well as parameterised dispersion models.

The FTPadv Expert software is optionally available for the film thickness probe FTPadv and part of the software package for the reflectometers RM 1000 and RM 2000.