The SENTECH Thin Film Metrology Seminar and Workshop took place on 9 -10 October 2024, at the SENTECH Campus in Berlin-Adlershof.
Our invited speakers shared the latest, fascinating application-based research results with our delegates from the international metrology community.
Invited expert speakers from both research & development and industry were in attendance at the 2024 SENTECH Thin Film Metrology Seminar and Workshop to give presentations on topics including FTIR spectroscopic analysis of thin film chemical composition, quality control of SiC-based technology, combining ellipsometry and transmission measurement for the characterisation of the electric percolation in thin metallic film, in-situ spectroscopic ellipsometric monitoring for high-κ dielectrics atomic layer deposition on Silicon Carbide, optical constants by VUV ellipsometry using synchrotron radiation compared to UV-VIS ellipsometry and In-situ analysis of thin ALD films combining XPS and spectroscopic ellipsometry.
In addition to the thin film metrology seminar on day one, day two featured a workshop covering an introduction to ellipsometry through to more advanced use cases. Experts from the SENTECH Metrology Application Team worked with delegates on individual use cases, to discuss the challenges and solutions for their non-confidential applications.
SENTECH would like to thank all of our invited speakers for their contributions to the agenda and all of the delegates for their attention, questions, and, insightful discussion.
If you would like to find out further information regarding the SENTECH Thin Film Metrology Seminar and Workshop, please email sales@sentech.de.
To take a look at the packed agenda from this year’s event, please click on the link below.
Program SENTECH Seminar and Workshop 2024
