A Shared Vision for Growth and Innovation
The cooperation focuses on the joint development of the LuXpector THEA, a non-destructive optical measurement system for analysing the thickness and homogeneity of thin-film coatings. By combining SENTECH’s advanced optical metrology expertise with PVA TePla’s technological platform, production capabilities, and global sales network, the partnership will deliver cutting-edge solutions that enhance quality, efficiency, and sustainability across semiconductor manufacturing.
Precision Meets Efficiency – Introducing LuXpector THEA
The LuXpector THEA (Tool for High-precision Ellipsometry Analysis) is a next-generation system that combines ellipsometry and reflectometry in a compact, cost-effective, and fast platform for precise thin-film characterisation. Designed for both R&D and high-volume production environments, LuXpector THEA provides high measurement accuracy for complex layer systems while minimising operational effort, maintenance and cost of ownership.
Core features include:
- Thin-film thickness and optical property measurement for dielectrics, metals, and semiconductor layers
- Process control for development and production
- Coating validation and material characterisation
What Sets the LuXpector THEA Apart?
- Cost-efficient operation: Intelligent, modular design and low maintenance reduce total cost of ownership (TCO).
- Serviceability built in: Remote support, modular components, and robust hardware ensure high uptime.
- User-friendly interface: Automated calibration and analysis functions simplify use, even for non-experts.
- Flexible Integration: Seamless integration into production lines with SEMI automation and SECS/GEM interface support.
Precision Metrology for Advanced Device Fabrication
The LuXpector THEA sets new standards in thin-film metrology. It delivers precise, repeatable measurements of film thickness, refractive index, and extinction coefficient across materials such as silicon oxides, nitrides, amorphous and polysilicon, photoresist, polyimide, thin metals (Al, Pt, Cr), and conductive films (TiN, TaN, TCO, ITO). Engineered for single films and complex multilayer stacks on substrates including Si, SOI, GaN-on-Si, and SiC. The LuXpector THEA empowers advanced RF/power device, MEMS, and sensor fabrication to continue driving innovation in the semiconductor and microelectronics industries.
First Look – LuXpector THEA Unveiled at SEMICON Europa 2025
Visitors to SEMICON Europa 2025 will have the opportunity to be among the first people in the industry to learn and experience the new LuXpector THEA at the PVA TePla booth (Hall 1, Booth 351).
Both the SENTECH team (Hall B1, Booth 900) and PVA TePla experts will be able to discuss potential application capabilities and how this innovative solution addresses material measurement and characterisation challenges in semiconductor metrology. You can make an appointment in advance to meet a member of the SENTECH team at SEMICON Europa Contact us
Learn More
For further details on the LuXpector THEA, view the product brochure.
