Hybrid Metal Oxide Silicon Nitride Material Platform for Large-Scale Integration (Quantum) Photonic Circuits – “Projekt MEXSIQUO”
Cutting-edge research in photonics is focused on developing materials for (quantum) photonic integrated circuits that enable advanced optical and nonlinear functions. Qualifying these materials as reliable, ready-to-use platforms compatible with microelectronics, scalable for mass production, and secure within global supply chains is a major challenge. “Projekt MEXSIQUO” takes a bold, alternative approach by functionalising, a CMOS-compatible silicon nitride (SiN) platform utilising optical active metal oxides, deposited on top of the waveguides. SENTECH Instruments GmbH will conduct research and develop a novel atomic layer deposition (ALD) super-cycle process for BaTiO3, Er-doped Titanium Oxide (Er:TiO2) and ER-doped Silicon Oxide (Er:SiO2) to enable the deposition of optically active oxide coatings on waveguides. By combining SiN waveguides with scalable, foundry-friendly metal oxides, “MEXSIQUO” opens the door to new, optically active capabilities within the passive SiN framework.
This approach paves the way for a new class of cost-effective, commercially viable photonic components with cutting-edge (quantum) optical functions. To read further information about the project click here.
Project Partners
- SENTECH Instruments GmbH – Berlin / Germany
- X-FAB Global Services GmbH – Erfurt / Germany
- Akhetonics GmbH – Berlin / Germany
- Fraunhofer Institute for Applied Optics and Precision Engineering (IOF) – Jena / Germany
Project Profile
- Program – Quantum systems research program
- Funding initiative – Innovative materials and processes for quantum systems
- Project volume – 2.5 million euros (72.4% funded by the BMBF)
- Project duration – October 1, 2024 – September 30, 2027
