The SENTECH “Plasma Process Technology Seminar” returns for 2023


(Participants of the plasma process technology seminar 2022)

SENTECH is happy to announce that we are once again organising the SENTECH Plasma Process Technology Seminar on 16 March 2023, at the SENTECH Campus in Berlin-Adlershof. The main purpose of the seminar is to make high-quality, application-based research results available to the plasma process community as well as to foster scientific discussion and ideas.

Invited expert speakers from both research & development and industrial science will be in attendance to give presentations on compound semiconductors, high-power lasers, quantum devices, low-damage atomic layer etching, and ICP-RIE of metals. Each talk will be designed to share, first-hand, challenges and solutions for working with some of today’s leading-edge applications including power devices, MEMS, optoelectronics, and sensors.
Attendees can expect to enjoy presentations covering many of the latest advances in plasma process technology topics, including ICP-RIE, ICPECVD process flexibility and controllability, atomic layer deposition, and low-damage atomic layer etching.

In addition, experts from SENTECH Instruments application, development, and technical service teams will be on-hand to show visitors the SENTECH application laboratories and production facilities.

To launch this year’s event, SENTECH will be hosting a roundtable dinner event. This event is open to all delegates joining the seminar and will take place on Wednesday 15 March 2023 at 7 PM. Delegates, expert speakers, and key members of the highly-skilled SENTECH team will have the opportunity to network in an informal atmosphere while enjoying a great meal.

The SENTECH Plasma Process Technology Seminar will take place at SENTECH Instruments, Schwarzschildstraße 2, Berlin-Adlershof, on Thursday, March 16, 2023. The event costs 300 EUR for those wishing to join the SENTECH Plasma Process Technology Seminar.
Spaces are limited and will be allocated on a first-come-first-served basis, so please ensure you return your completed registration form to or by fax to +49 89 897 9607 22 at your earliest convenience.

Anmeldeformular und Programm:

 ANMELDUNG - SENTECH Plasmaseminar 2023 

 PROGRAMM - SENTECH Plasmaseminar 2023 

Registration form and program:

 REGISTRATION - SENTECH Plasma seminar 2023 

 PROGRAM - SENTECH Plasma seminar 2023