Plasma_Seminar_2023_Main article

The SENTECH “Plasma Process Technology Seminar” 2023

(Participants of the plasma process technology seminar 2023)

The SENTECH Plasma Process Technology Seminar took place on 16 March 2023, at the SENTECH Campus in Berlin-Adlershof. Our invited speakers shared the latest, fascinating application-based research results with our delegates from the international plasma process community.

Invited expert speakers from both research & development and industrial science were in attendance to give presentations on compound semiconductors, high-power lasers, quantum devices, low-damage atomic layer etching, and ICP-RIE of metals. Each talk was designed to share, first-hand, challenges and solutions for working with some of today’s leading-edge applications including power devices, MEMS, optoelectronics, and sensors.

Attendees enjoyed presentations covering many of the latest advances in plasma process technology topics, including ICP-RIE, ICPECVD process flexibility and controllability, atomic layer deposition, and low-damage atomic layer etching.

In addition, experts from SENTECH Instruments application, development, and technical service teams were on-hand to show our delegates the SENTECH application laboratories and production facilities.

To launch the event this year, SENTECH held a roundtable dinner event where our delegates, expert speakers and, members of the SENTECH team joining the seminar had the opportunity to network in an informal atmosphere while enjoying a great meal.

SENTECH would like to thank all of our invited speakers for their contributions to the agenda and all of the delegates for their attention, questions, and, insightful discussion.

If you would like to find out further information regarding the SENTECH Plasma Process Technology Seminar, please email To take a look at the packed agenda from this year's event, please click on the links below

Deutsches Programm:

 PROGRAMM - SENTECH Plasmaseminar 2023 

English program:

 PROGRAM - SENTECH Plasma seminar 2023