Berlin 06.11.2019

SENTECH Ellipsometry Seminar and Workshop 2018


(Participants of SENTECH Seminar " Ellipsometry and Reflectometry for Quality Control of Thin Films" 2019)

On November 6th, 2018 SENTECH organized the seminar "Ellipsometry and Reflectometry for Quality Control of Thin Films" in Berlin-Adlershof. Professional external speakers as well as SENTECH experts gave presentations on possible applications of optical measurement techniques of ellipsometry and reflectometry.

Customers spoke about current topics in the field, such as applying scatterometry to surface characterization, cryogenic measurements, and nanotechnology applications. SENTECH experts introduced new developments of our optical thin-film metrology, e.g. in photovoltaics, regarding the optimization of ALD processes using in-situ ellipsometry and in industrial quality control.

On the second day, the first SENTECH workshop on spectroscopic ellipsometry took place. This workshop was dedicated to users. They were given the opportunity to get to know and use the SpectraRay/4 software in small groups under guidance of SENTECH experts.