Krailling, 04.01.2017

SENTECH invitation to the seminar on “Plasma-Process-Technology”

SENTECH_Plasma Seminar 2016

(Participants of the Seminar Plasma-Process-Technology April 7th, 2016)

SENTECH offers an application oriented seminar “Plasma-Process-Technology” on March 9, 2017 at SENTECH in Berlin-Adlershof. We are glad to announce that invited speakers from industry and science will give presentations on plasma etching, PECVD and PEALD and share their experiences with different applications.

Current topics such as low-damage etching in sensor technology, deep silicon etching, deposition of multilayer systems with ALD and first results of layers deposited with spatial PEALD at standard pressure will be in focus. In addition, SENTECH Instruments employees present new developments in fields of vacuum clusters and applications.

For further information please download the full program here:  Program Plasma Seminar 2017 .

After the seminar, all participants will be invited to visit SENTECH application laboratories and production facilities. We are looking forward to welcome you at SENTECH in Berlin!

The SENTECH Seminar on „Plasma-Process-Technology” will take place at SENTECH Instruments, Schwarzschildstraße 2, Berlin-Adlershof, on Thursday, March 9, 2017. The registration fee is 238,00 € including VAT.

Please send the   Registration Form   to SENTECH per fax no.: +49 89 8979607-22 or via email to For further information see the  Plasma Seminar Invitation  or please call: +49 89 8979607-0.