Application Support

Best application support is provided by SENTECH’s highly qualified application experts. In our well-equipped application laboratories of more than 150 m2 they develop new solutions for projects' or customers’ requirements. Interesting tasks are generalized to open up new fields of application for SENTECH products.

Contact  our experts for:

  • Quick advice by e-mail or telephone
  • Device demonstrations
  • Processing of customer samples
  • User training at SENTECH or at the customers’ site
  • Contract measurements, etch / deposition orders of greater amount

Atomic Layer Deposition

Dr Paul Plate

Phone: +49 30 6392 5637
Fax: +49 30 6392 5522

Plasma Process Technology

 Dr Marcel Schulze

Phone: +49 30 63 92 5546
Fax: +49 30 6392 5522

Thin Film Metrology

Mr Sven Peters

Mr Robert Meyer

Phone: +49 30 6392 5521
Fax: +49 30 6392 5522

ALD PECVD and Ellipsometry SENTECH application lab


  • ICP-RIE systems (fluorine etching, methane hydrogen processes, chlorine chemistry)
  • PECVD systems (dielectric layer deposition)
  • ICPECVD systems (for much lower temperatures)
  • ALD system (thermal and plasma enhanced atomic layer deposition)
  • Spectroscopic ellipsometer, scanning electron microscope, profilometer
    (for sample characterization)



  • Spectros­copic ellipsometers
    (spectral range 190 nm to 25 μm)
  • Reflectometers (400 nm to 2 μm)
  • Laser ellipsometers (different configurations)
  • Special sensor arrangement for the measurement on thin film solar cells