Plasma Process Technology
and Thin Film Metrology

Discover SENTECH, a leading provider of low-damage plasma process systems and thin film metrology tools for semiconductor research and industry.

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Explore Our Products

Visit our comprehensive product overview, to learn more about the latest developments in plasma process technology systems and thin film metrology tools from SENTECH.

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Plasma Process Technology​

Discover the reliable, durable, and versatile low-damage plasma etch and deposition systems from SENTECH.​

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Thin Film Metrology

Explore the thin film metrology tools designed to deliver repeatable, consistent, and accurate results.​

Applications and Industries

SENTECH provides ongoing application support for the lifetime of your system or tool. Speak to our experts to help you find the solutions to your process challenges.

MEMS

Learn how SENTECH plasma systems and metrology tools are ideal for processing advanced micro-electromechanical systems and applications.

Optoelectronics

Learn how SENTECH plasma systems and metrology tools are ideal for processing advanced optoelectronics applications.

Power Devices

Learn more about GaN and SiC, the materials supporting this emerging technology in the semiconductor industry.

Sensors

Learn how SENTECH plasma systems and metrology tools are ideal for processing advanced sensor applications.

Quality Control

Optimise your etch and deposition processes for performance, reliability, and yield with precision thin film metrology tools for quality control.

Contact us and request a quote

Upcoming Events

03 - 05 February 2026

ICONN- International Conference on Nanoscience and Nanotechnology

Meet SENTECH at ICONN

read more
09 - 12 February 2026

13th Workshop on Spectroscopic Ellipsometry WSE 2026

The SENTECH team will be at WSE

read more
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Working at SENTECH

Located in Germany’s leading science and technology park Adlershof in Berlin, SENTECH Instruments has become one of the world market leaders in equipment production for plasma process technology and thin film metrology. Click on “Careers” to see a full list of our current vacancies.