Plasma Process Technology
and Thin Film Metrology
Discover SENTECH, a leading provider of low-damage plasma process systems and thin film metrology tools for semiconductor research and industry.
Explore Our Products
Visit our comprehensive product overview, to learn more about the latest developments in plasma process technology systems and thin film metrology tools from SENTECH.

Plasma Process Technology
Discover the reliable, durable, and versatile low-damage plasma etch and deposition systems from SENTECH.

Thin Film Metrology
Explore the thin film metrology tools designed to deliver repeatable, consistent, and accurate results.
Applications and Industries
SENTECH provides ongoing application support for the lifetime of your system or tool. Speak to our experts to help you find the solutions to your process challenges.
Working at SENTECH
Located in Germany’s leading science and technology park Adlershof in Berlin, SENTECH Instruments has become one of the world market leaders in equipment production for plasma process technology and thin film metrology. Click on “Careers” to see a full list of our current vacancies.
Berlin/Germany
Berlin/Germany
Berlin/Germany
