Ellipsometers, Reflectometers

Ellipsometers and Reflectometers for Research and Development

 

SENresearch

Spectroscopic Ellipsometers


SENresearch - UV-VIS-NIR spectroscopic ellipsometer family

SENpro - cost effective spectroscopic ellipsometer

SENDIRA - Infrared spectroscopic ellipsometer

 

SE 400adv

Laser Ellipsometers and CER


SE 400adv - multiple angle laser ellipsometer 

SE 500adv - combined ellipsometry and reflectometry CER 

 

FTPadvanced 

Reflectometers


FTPadvanced - Film Thickness Probe 

RM 1000 - reflectometer

RM 2000 - reflectometer

 
Ellipsometers and Reflectometers for Industrial Quality Control
 

SENDURO

SENDURO® - automated spectroscopic ellipsometer for industrial applications

 

SE 800 GSSE 800 GS - automated spectroscopic ellipsometer for layers on large glass panels

Measures: Thickness of single films and layer stacks, optical constants

 

FTPadvanced Inline

FTPadvanced Inline - manual mapping table to characterize thin films on glass by relfectometry and sheet resistance measurement (4-point probe sensor or non-contact Eddy current sensor)

 

SE 400 B - Laser elliposmeter for the measurement of organic films on sheet steel 

 

Ellipsometers and Reflectometers for Photovoltaics

 


SE 400adv PV - measures thickness and refractive index of anti-reflection coatings on textured multicrystalline and monocrystalline solar cells

 

SE 800 PV

SE 800 PV - Spectroscopic Ellipsometer for the analysis of single films and layer stacks on monocrystalline and multicrystalline silicon solar cells

 

RM 1000  - Reflectometer for the measurement of thickness of antireflective films on monocrystalline and multicrystalline silicon solar cells 

 

FTPadv Inline - Inline measurement system for film thickness analysis of thin film solar cells by reflectometry


Number of sensor heads: maximal 7

 

Mapping Systems for large area substrates

 

SenSol M - manual measurement system for thin film solar cells with multiple sensor platform


Panel size: 1.1 m x 1.6 m, 1.1 m x 1.4 m, others on request


Sensors for:

- Reflection measurements on smooth and rough films

- Non-contact sheet resistance measurement (Eddy current method)

- 4-point probe sheet resistance measurement


 

SenSol H - horizontally configured, computer controlled mapping system for thin film solar cells with multiple sensor platform

Panel size: 1.1 m x 1.6 m, 1.1 m x 1.4 m, others on request


Sensors for:

- reflection measurements on smooth and rough films

- transmission measurements on smooth and rough films

- non-contact sheet resistance measurement (eddy current method)

- 4-point probe sheet resistance measurement



 
 

SenSol V - vertically configured, computer controlled mapping system for thin film solar cells with fixed multiple sensor platform

Panel size: 1.1 m x 1.6 m, 1.1 m x 1.4 m, others on request


Sensors for:

- reflection measurements on smooth and rough films

- transmission measurements on smooth and rough films

- non-contact sheet resistance measurement (eddy current method)

- 4-point probe sheet resistance measurement