SENDURO
Highlights and advantages:
The total time to analyze a sample will take no longer than may be ten seconds! This time includes all necessary steps; i.e.:
The SENDURO® liberates the user from manually aligning the sample by height and tilt required for precise and repeatable ellipsometric measurements. The patented automatic alignment device strongly reduces operation errors, works for transparent and reflective samples and makes automatic maps possible even on bent wafers.
The SENDURO® comes with a large library of predefined applications for multi-layer analysis. SENDURO´s® intelligent AutoModel feature identifies the proper sample structure from a range of predefined applications during a measurement.
SENTECH´s SENDURO® software allows the thickness- and index-of-refraction-measurements of single films and layer stacks by excellent operator guidance and is designed for a minimum of operator interactions. This is achieved by supplying an extensive task library of executable applications including automatic sample alignment, fast data acquisition and fitting and extensive reporting of results.
The SENDURO® software comes with powerful analyzing tools including an AutoModel function, excellent reporting functionality and large, customizable material and layer database to modify already existing or to set-up new applications. It includes integrated packages of modeling, simulation and fitting in order to support processing even for complex tasks. Password controlled user login is supported with a flexible management.
- High sample throughput rate
- Fully automatic sample alignment
- Measurement on Transparent and Absorbing substrates
- Pushbutton operation
- Comfortable Software User Interface
- High accuracy for any type of application
- Minimized installation effort
The total time to analyze a sample will take no longer than may be ten seconds! This time includes all necessary steps; i.e.:
- placing the sample on the sample slide,
- starting the measurement procedure by pushing a button to begin the steps:
- automatic alignment,
- actual measurement,
- calculation,
- displaying the results
- removing the sample.
The SENDURO® liberates the user from manually aligning the sample by height and tilt required for precise and repeatable ellipsometric measurements. The patented automatic alignment device strongly reduces operation errors, works for transparent and reflective samples and makes automatic maps possible even on bent wafers.
The SENDURO® comes with a large library of predefined applications for multi-layer analysis. SENDURO´s® intelligent AutoModel feature identifies the proper sample structure from a range of predefined applications during a measurement.
SENTECH´s SENDURO® software allows the thickness- and index-of-refraction-measurements of single films and layer stacks by excellent operator guidance and is designed for a minimum of operator interactions. This is achieved by supplying an extensive task library of executable applications including automatic sample alignment, fast data acquisition and fitting and extensive reporting of results.
The SENDURO® software comes with powerful analyzing tools including an AutoModel function, excellent reporting functionality and large, customizable material and layer database to modify already existing or to set-up new applications. It includes integrated packages of modeling, simulation and fitting in order to support processing even for complex tasks. Password controlled user login is supported with a flexible management.
Downloads:
Brochure (Spectroscopic Ellipsometer SENDURO®) (
Please contact us for more information.