Optical Coatings
Typical applications are antireflecting (e.g. SiO2, TiO2, Ta2O5), electrochrome (e.g Ta2O5), photocatalytic (e.g. TiO2) and low-e (e.g. Ag, SnO2, ZnO) coatings on windows pane, architecture and car glass.
Fully automated table top measurement tool SENDURO
- Off-line monitoring of film thickness and uniformity of sputtering processes
- Analysis of multiple layer stacks (AR and low-e coatings)
Film Thickness Probe FTPadvanced attached to large sample platform
- Fast and accurate measurement of uniformity of film thickness on large glass substrate (e.g. 60 x 90 cm2)
- Manual and motorized sample platforms available
SENresearch spectroscopic ellipsometer SE 850- Variable angle measurement of layer stacks on glass
- Optional micro spot
SENresearch spectroscopic ellipsometer SE 801
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In-line measurement of complete layer stacks on windows pane
- Height and tilt adjustable ellipsometer moves across the windows pane
- Fast and accurate thickness measurement of each film
SENresearch spectroscopic ellipsometer SE 801
- Vertical single port attachment of spectroscopic ellipsometer on a deposition system for large glass substrates
- In-line monitoring of deposition process
Laser ellipsometer SE 400advanced
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Highest available accuracy and sensitivity for measurement of film thickness and refractive index
- Fast and easy off-line measurement of single films on glass