12489 Berlin, Germany
SENTECH Instruments develops and manufactures advanced quality instrumentation for Thin Film Metrology (reflectometer, ellipsometer, spectroscopic ellipsometer) and Plasma Process Technology (plasma etcher, plasma deposition systems, customized solutions).
SENTECH has specific know-how in reactive ion etching (RIE) using ICP plasma, for instance, to etching compound semi-conductors and micro optics. Our strength lies in low damage deposition of thin layers by IC-PECVD, for example for nanotechnology.
SENTECH spectroscopic ellipsometers apply a leading edge technology in the characterization of thin layers. Today's popular examples are passivation coating and TCOs for solar cells.
Delfter Str. 6
Freiberg Instruments offers a variety of fast, non-destructive, electrical characterization tools, which measure parameters like minority carrier lifetime, photoconductivity and resistivity. These products are capable of being integrated in production lines.