ICP-RIE Plasma Etching:

Plasma_cryogenicSiPlasma_DeepEtchPlasma_lithographyPlasma_MCTPlasma_PhCPlasma_quantumdotsPlasma_SiCHolesSI591_anisotropic
Mar 14, 2018 - Mar 16, 2018
Shanghai, China

Contact

SENTECH Instruments GmbH
Schwarzschildstraße 2, 12489 Berlin, Germany

Phone: +49 30 6392 5520
Fax: +49 30 6392 5522
E-mail: info@sentech.de

German sales office: SENTECH GmbH
Web: www.sentech-sales.de

Worldwide sales offices:
SENTECH Distributor Network

SENTECH Instruments GmbH develops, manufactures, and sells advanced quality instrumentation for (reflectometers, ellipsometers, spectroscopic ellipsometers), Photovoltaics (inline and offline measurement tools), and  (plasma etchers, plasma deposition systems, ALD, customized solutions).

New Liquid Cell

Developed for organic research by SENpro

  • Multiple angle measurements
    at 3 different angles of incidence
  • Small volume of ~ 26 ml
  • Heating from room temperature up to 70 °C
  • 2 hose connections for continuous liquid flow
  • Layer monitoring by spectroscopic ellipsometer