ICP-RIE Plasma Etching:

Plasma_cryogenicSiPlasma_DeepEtchPlasma_lithographyPlasma_MCTPlasma_PhCPlasma_quantumdotsPlasma_SiCHolesSI591_anisotropic
May 31, 2017 - Jun 02, 2017
Munich, Germany
Jun 07, 2017 - Jun 08, 2017
Moscow, Russia
Jun 11, 2017 - Jun 14, 2017
Linköping, Sweden
Jun 26, 2017 - Jun 29, 2017
Jul 15, 2017 - Jul 18, 2017

Contact

SENTECH Instruments GmbH
Schwarzschildstraße 2, 12489 Berlin, Germany

Phone: +49 30 6392 5520
Fax: +49 30 6392 5522
E-mail: info@sentech.de

German sales office: SENTECH GmbH
Web: www.sentech-sales.de

Worldwide sales offices:
SENTECH Distributor Network

SENTECH Instruments GmbH develops, manufactures, and sells advanced quality instrumentation for (reflectometers, ellipsometers, spectroscopic ellipsometers), Photovoltaics (inline and offline measurement tools), and  (plasma etchers, plasma deposition systems, ALD, customized solutions).

New Liquid Cell

Developed for organic research by SENpro

  • Multiple angle measurements
    at 3 different angles of incidence
  • Small volume of ~ 26 ml
  • Heating from room temperature up to 70 °C
  • 2 hose connections for continuous liquid flow
  • Layer monitoring by spectroscopic ellipsometer