Thin Film Solar Cells
SenSol is the automated large area mapping system in SENTECHs portfolio for photovoltaics. The homogeneity of film thickness, sheet resistance, haze, reflection, and transmission is automatically characterized. Using the SenSol, the uniformity of deposition processes on large glass sheets is monitored and thereby the time for restarting the manufacturing after tool cleaning can be significantly reduced. Details for SenSol here!
High speed inline measurement of reflectance, transmittance and film thickness is design feature of the RT Inline. An array of sensor heads scans the reflection and/or transmission of the thin films on large glass sheets, internally referencing the measurement. Inline process monitoring of layer deposition is easily performed and supported by FTPadv Expert software. A software interface is available for data communication to the host computer. Details for RT Inline here!