Technical Service

Local support:
 
Europe:

SENTECH Instruments
Carl-Scheele-Str.16
12489 Berlin
Germany

Phone: +49 30 6392 5520
Fax: +49 30 6392 5522
E-mail: info@sentech.de
 
 
Japan:

Hakuto Co., Ltd.
1-13, Shinjuku, 1-Chome, Shinjuku-ku,
Tokyo 160-8910
Japan

Mr. Morihiko Imanaka
Phone: +81 3 3225 3424
Fax :+81 3 3225 9013
E-mail: imanaka-m@hakuto.co.jp
 
Service staff:
 
R. Kögel Roland Kögel
Technical Service Manager

Plasma Process Technology
Thin Film Metrology

Phone: +49 (0)30 6392 5555
Fax: +49 (0)30 6392 5522
E-mail: service@sentech.de