Product overview

Thin Film Measurement Systems
Research and development
  • Advanced Film Thickness Probe
  • Reflectometer for materials analysis
  • Laser ellipsometers for ultimate precision
  • Wide range spectroscopic ellipsometers

Industrial quality and in-line control
  • Large area measurement systems
  • Automated spectroscopic ellipsometers for routine use
  • In-line process control
 
Plasma Process Technology
      Research and development
  • RIE etcher with and without loadlock
  • RIE for cleaning processes
  • ICP etcher
  • PECVD and ICPECVD deposition systems
  • Optical process monitoring

      Industrial processing
  • Fully automated ICP and RIE etchers for compound semiconductor processing
  • Multiple reactor systems with cassette to cassette loading
  • Large area sample processing for masks and micro-optics