Spectroscopic ellipsometer software SpectraRay/3

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Simulation

Measurement parameters may be simulated as function of wavelength, photon energy, reciprocal centimeter, angle of incidence, time, temperature, film thickness, and other parametersSimulating: Ellipsometric parameter Ψ, Δ, tan(Ψ), cos(Δ) SpectraRay_glossar-parameter_120pxFourier coefficients Reflectance R, Rp, Rs Transmittance T Optical properties
n, k, ne, no, ke, ko Material properties ε1, ε2 MSE value Color values .

Mapping

The mapping optionSpectraRay_glossar-mapping_280px Multilayer analysis by SpectraRay/3:
Thickness of Si3N4 / SiO2 / Si3N4 [nm] features predefined or user defined patterns, extensive statistics, and graphical display of data as 2D color, gray, contour, +/- deviation from mean value and 3D plot.

  • Setting measurement parametersSpectraRay_glossar-parameters_px Sample information Angle of incidence:
    Single or multiple angle measurement     Wavelength range Measurement mode:
    (Ψ, Δ), (S1, S2), T, Rp, Rs     Mapping options     and starting measurement
  • Building a model by drag and drop from a materials library or from already existing dispersion models
  • Defining and varying parameters to fit the calculated spectra to the measured spectra
  • Interactively improving the model for best figure of merit
  • Reporting the results as a word document by selecting from predefined or customized templates
  • Saving all experimental data, the protocol, and comments in one experiment file
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The advantage of SpectraRay/3 recipe mode is a two step action:

  • Selection and
  • Execution of predefined recipes from a library.

The recipes comprise measurement parameters, models, fitting parameters, and reporting templates.

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SpectraRay/3, the SENTECH proprietary ellipsometer software, includes data acquisition, modeling, fitting, and extended reporting of ellipsometric, reflection, and transmission data. It supports variable angle, multi-experiment, and combined photometric measurements. SpectraRay/3 includes a huge library of materials data based on SENTECH measurements and literature data as well. The large number of dispersion modelsSpectraRay_glossar-dispersion_110px Dispersion models: Brendel oscillator Cauchy Cody-Lorentz Drude-Lorentz oscillator Effective medium and index gradient Extended Drude Formula Forouhi-Bloomer Hamberg Harmonic oscillator Sellmeier Sernelius Spectral combination Tanguy Tauc-Lorentz Uniaxial & biaxial anisotropic
and others allows modeling of nearly any type of material.

SpectraRay/3 provides a user-friendly workflow oriented interface to operate SENTECH spectroscopic ellipsometers and a comprehensive set of tools to model, fit, and represent ellipsometric data. The user interface incorporates a recipe oriented operation for operators and an advanced mode for interactive measurement and modeling.

SpectraRay/3 measures uniaxial and biaxial anisotropic materials, films, and layers. The software treats sample effects like depolarization, non-uniformity, scattering (Mueller-matrix), and backside reflection.

SpectraRay/3 includes all utilities of general spectroscopic software package for data import and export (ASCII included), file management, arithmetic manipulations of spectra, display, printing, and reporting (in Word file format *.doc). The scripting capability makes it very flexible to automate routine measurements, tailor it for demanding applications, and control third party hardware like sensors, heating stage, sample cell or cryostat.

Documents   To get more information, please click here.

Documents   To get more information, please click here.