Cost-effective spectroscopic ellipsometer SENpro

Cost-efficiency

The SENpro is a cost-effective spectroscopic ellipsometer without compromising advanced measurement performance.

Preset angle of incidence

The SENpro comprises a goniometer with preset angles of incidence in 5 °-steps (40 ° – 90 °) to optimize the ellipsometric measurement.

Step Scan Analyzer principle

The unique Step Scan Analyzer principle is featured by SENpro. During data acquisition, polarizer and wide band compensator are fixed to provide highest accuracy of the ellipsometric measurement.

The SENpro features simple operation, measurement speed, and combined data analysis of ellipsometric measurements at different angles of incidence. It measures in the spectral range of 370 nm to 1,050 nm. The majority of applications to determine thickness and optical constants of single films and multilayer stacks can be performed easily.

The cost-effective, table top SENpro comprises the VIS-NIR ellipsometer optics, 5 °-step goniometer, sample platform, laser alignment, fiber coupled stabilized light source, and detection unit. The SENpro comes with the spectroscopic ellipsometer software SpectraRay LT for system control and data analysis including modeling, simulation, fitting, and presentation of data. Ready-to-use application files make the operation very easy even for beginners. SpectraRay LT supports computer controlled mappingMapping range from 50 x 50 mm² up to 300 x 300 mm² for uniformity measurements.

The SENpro is focused on speed and accuracy for the measurement of thin films wherever they are applied. Applications range from extreme thin layers of 1 nm to thick layers up to 15 μm. For a large variety of applicationsApplications in: R & D Nanotechnology Microelectronics Optoelectronics Organic electronics Glass coatings Display technology Bioscience Life science , predefined recipes are offered by SpectraRay LT.