SENDURO

SENDURO®, the new revolutionary spectroscopic ellipsometer
SENDURO
 
Highlights and advantages:
  • High sample throughput rate
  • Fully automatic sample alignment
  • Measurement on Transparent and Absorbing substrates
  • Pushbutton operation
  • Comfortable Software User Interface
  • High accuracy for any kind of application
  • Minimized installation effort

The total time to analyze a sample will take no longer than may be ten seconds! This time includes all necessary steps; i.e.:
  • placing the sample on the sample slide,
  • starting the measurement procedure by pushing a button to proceed the steps:
    • automatic alignment,
    • actual measurement,
    • calculation,
    • displaying the results
  • removing the sample.

The SENDURO® liberates the user from manual sample alignment in height and tilt required for precise and repeatable ellipsometric measurements. The patented automatic alignment device strongly reduces operation failures, works for transparent and reflective samples and makes automatic maps possible even on bent wafers.

The SENDURO® comes with a large library of predefined applications for multi-layer analysis. SENDURO´s® intelligent AutoModel feature identifies the proper sample structure out of a range of predefined applications during a measurement SENDURO® operating and analysis

SENTECH´s SENDURO® software allows thickness- and index-of-refraction-measurements of single films and layer stacks by excellent operator guidance and is designed for a minimum of operator interactions. This is realized by supplying an extensive task library of executable applications including automatic sample alignment, fast data acquisition and fitting and extensive reporting of results.

The SENDURO® software comes with powerful analyzing tools including AutoModel function, excellent reporting functionality and large, customizable material and layer database to modify already existing or to set-up new applications. It includes integrated packages of modeling, simulation and fitting in order to support the processing of even complex tasks. Password controlled user login with a flexible management is supported.
 

Downloads:

PDF Brochure (Spectroscopic Ellipsometer SENDURO®) (307.76 kb)

Please contact us for more information.