SENDIRA
In the infrared spectral range spectroscopic ellipsometry is applied to gain information of the vibrational and electrical properties of layers and materials.
The SENDIRA covers the infrared spectral range from 1,7 µm to 25 µm ( 6000 cm-1 to 400 cm-1) with FT IR precision and high resolution. The SENDIRA provides detailed chemical, mechanical, electrical and optical information on complex layer systems. With the SENDIRA the investigation of new layer materials like organic conductors, OLEDs and polymers in the spectral range of vibrational spectroscopy offers excellent results.
The SENDIRA is operated through SpectraRay and it is an excellent research tool but it can be used effectively in quality control as well. Substrates up to 300 mm diameter can be investigated and scanned.
The external beam of an FTIR is used as radiation source and by this offers a maximum of flexibility, the spectrometer can still be used as a stand alone tool. The measurement spot on the sample can be adjusted by means of a field aperture.
The SENDIRA comprises the purged infrared optics including retarder, the motorized goniometer, the sample stage, a PC and the control electronics, SENTECH’s SpectraRay II software for data acquisition, library based modeling, simulation and spectral fitting and in the standard configuration a Varian FT-IR spectrometer Scimitar to be functional in the MIR spectral range.
- measurement of thickness and refractive index of films and layer stacks
- measurement of optical properties of materials in the MIR spectral range
- measurement of carrier concentration
- measurement of carrier mobility
- analysis of chemical composition
- investigation of anisotropic organic films
| Spectral range: | 400 cm-1 - 6000 cm-1 |
| Angle of incidence: | Continuously variable computer controlled goniometer, 40º - 90º |
| Sample thickness: | < 10 mm |
| Sample size: | up to 200 mm diameter (optional 300 mm) |
| Measuring spot | adjustable from 1 to 10 mm |