LaserPro
Low cost laser ellipsometer LaserPro
The LaserPro ellipsometer represents a new generation of low cost laser ellipsometers featuring super fast measurement (no moving parts during data acquisition), ease of use and simple operation.
The LaserPro measures thickness and index of refraction of single films. The variable angle capability of the LaserPro provides unambiguous measurements of layer thickness and multilayer measurement capability.
The LaserPro ellipsometer represents a new generation of low cost laser ellipsometers featuring super fast measurement (no moving parts during data acquisition), ease of use and simple operation.
The LaserPro measures thickness and index of refraction of single films. The variable angle capability of the LaserPro provides unambiguous measurements of layer thickness and multilayer measurement capability.
Specifications
- Laser wavelength 632.8 nm
- (z-tilt) stage, sample platform on 25 mm x-y sample stage
- Goniometer with angles of incidence set in 5º steps from 45° to 70°
- Small footprint
- USB interface to optional PC
LaserPro software features:
- single measurement of thickness and refractive index
- online measurement report
- fast kinetic measurements of psi and delta (minimal 40 µs, typical 1ms)
- multiple angle measurements
Please contact us for more information.