FTPadv EXPERT
SENTECH’s software for measuring film thickness and refractive index
The FTPadvanced EXPERT is an optional software package for advanced analysis of reflection measurements. It extends the standard software package of the FTPadvanced for the application of materials with unknown or not constant optical properties and offers a powerful tool to experienced users. Film thickness and refractive index of single films and each layer of a layer stack can be measured.
The software is based on the easy to use operational concept realized in the FTPadvanced standard software.
The FTPadvanced EXPERT is an optional software package for advanced analysis of reflection measurements. It extends the standard software package of the FTPadvanced for the application of materials with unknown or not constant optical properties and offers a powerful tool to experienced users. Film thickness and refractive index of single films and each layer of a layer stack can be measured.
The software is based on the easy to use operational concept realized in the FTPadvanced standard software.
The red highlighted areas show the fitted parameters. The dispersion of the refractive index is measured and given in the model at a customized wavelength. The thickness result of the main film can be displayed within the big thickness result area.
The software package comprises a large and extendable material library based on tabulated material files as well as parameterized dielectric functions. Each parameter of a modeled material can be determined by fast fitting procedure.
| Dispersion Relation | Typical Application |
|---|---|
| n,k fix | Air, Guess for weak spectral dependency, Backside of transparent substrates in restricted spectral range |
| Data table | Substrates |
| Cauchy | Transparent or weak absorbing films |
| Sellmeier | Transparent or weak absorbing films |
| Schott transparent | Glass substrates |
| Forouhi – Bloomer | Amorphous semiconductors |
| Leng oscillator, improved | (Poly)silicon, amorphous silicon |
| Drude – Lorentz – oscillator | Metals, absorbing organic materials |
| Tauc – Lorentz | (Poly)silicon, amorphous silicon |
| Effective medium approximation (EMA) | Roughness, interfaces |
The accuracy of measuring refractive indices using a single beam reflectometer set-up is restricted by need reference measurement and absolute intensity dependence of the reflectivity. Ellipsometric measurements are recommended for refractive index accuracy better than 10-2.
Please contact us for more information.