FTPadv

Key features:
  • Large database of predefined customer proven and ready to use applications.
  • The huge material database which benefits from SENTECH's spectroscopic ellipsometer experience.
  • Measurement of dielectrics on semiconductors, semiconductors on semiconductors, polymers on silicon, films on transparent substrates, films on metallic substrates.
  • AutoModel option which allows to distinguish between your every day applications.
 
FTPadv
 
More features:
  • Measures the thickness and refractive index of transparent and weakly absorbing films on reflective and glass substrates
  • Menu driven software ensures easy operation
  • An entire spectrum can be measured in less than 300 ms
  • 32bit software runs under WinNT, Win2000, WinXP on any modern notebook or desktop PC
  • Measurement may be set to continuously
  • Measures film thickness from 50 nm up to 20000 nm with high accuracy and reproducibility
  • Ease of use is built in by predefined applications
  • Any layer out of a multilayer sample may also be measured
  • Statistical analysis, measured values and sample/operator identification are all output in a protocol which can be printed and/or stored on disk
  • Additional mapping software which can control a motor driven sample stage
  • The lateral distribution of the film thickness, the reflectivity (at constant wavelength) or the position (wavelength axis) of a spectral peak, can be measured and displayed using the available plot options.
  • Can be used with or without a microscope; normal incident white light is used.
 
Specifications:

Measurement time typ.:300 ms
Thickness range: 50 - 20000 nm (FTPadv-1),
50 - 25000 nm (FTPadv-2)
Accuracy (for 0.4 micron thick film):1 nm
Precision (for 0.4 micron thick film):0.3 nm (1 sigma)

Measurement spot with microscope (FTPadv-1):80 microns diameter for 10x lens magnification;
without microscope (FTPadv-2):approximately 2-4 mm diameter (depending on sample-objective lens distance)

Light source (for measurement without microscope) Measurement at normal incidence.stabilized 20 W halogen light source, fiber optic connection for illumination and reflection
 

Downloads:

PDF Brochure (Film Thickness Probe FTPadvanced) (1.27 Mb)

Please contact us for more information.