SE 800 GS

SE 800 GS - automated spectroscopic ellipsometer for layers on large glass panels

The measuring system SE 800 GS serves control of thin films and layer stacks on large glass panels, for example with the manufacturing of solar cells and displays. SENTECH Instruments supplies the measuring system SE 800 GS for large glass panels with different sensors especially developed for accurate and reliable measurements of film properties in process control. Sensors are available for spectroscopic ellipsometry, reflectometry, transmission, sheet resistance and haze.

Typical fields of applications are optical coatings (TiO₂, SiO₂), low-e coatings (ZnO, SnO₂, TiO₂, Ag) and thin film solar cells (а-Si, µc-Si, ITO, CdS, ZnO, ZnO:Al, SiNx) especially focussing on multi-layer stacks  and transparent conductive oxides (TCO). In case of TCO films it is necessary to control both the film thickness and the sheet resistance.

Non-contact and fast measurement of the sheet resistance is realised by an Eddy current sensor. TCO films are intentionally manufactured with surface roughness especially for photovoltaic applications. Reflectivity and transmission sensors are applied to control surface roughness.  

The measuring system for large glass plates SE 800 GS can be customized for glass panels with sizes from 50 x 50 cm² to 200 x 200 cm². Typically, robots transfer the large glass plates to and away from measurement tools in production lines for thin film solar cells or flat panels. The SE 800 GS allows robot loading from one side as well as manual loading from the opposite side.

Please contact us for more information.