SE 800 PV
The spectroscopic ellipsometer SE 800 PV measures thickness and refractive index of antireflective coatings on textured monocrystalline and microcrystalline silicon solar cells. The dispersion of SiNx ARC films can be determined. The ellipsometer is especially suited to analyze layer stacks on silicon solar cells using multiple angle measurements in a wide range of incidence angles between 40° and 80°.
The high sensitivity of the instrument allows to analyze buffer layers and TCO films on rough absorber layers of thin film solar cells (CIS, CIGS). Textured TCO films on glass can also be measured in the UV-VIS spectral range.
| Spectral range | 280 - 930 nm, optional 240 nm |
| Incident angles | 40° - 90°, 5° steps, optional motorized goniometer |
| Spot size | 2 - 5 mm |
| Wafer platform | 150 mm, 200 mm and 300 mm diameter |
| Mapping | 150 mm and 200 mm x-y mapping |
