Flexibile Mapping Tool
MDPmap is designed as a compact bench top contactless electrical characterisation tool for offline production control or R&D, measuring parameters like carrier lifetime, photoconductivity, resistivity and defect information over a wide injection range in steady state or short pulse excitation (μ-PCD). Automated sample recognition and parameter setup allows an easy adaption to a big variety of different samples comprising epitaxial layers, after various preparation stages ranging from as-grown wafers to up to 95% metallised ones.
The major advantage of MDPmap is its high flexibility. Which allows for instance the integration of up to four lasers either for injection level dependent lifetime measurements ranging from ultra low to high injection or extracting depth information by using different laser wavelengths. Bias light facility is included as well as options for μ-PCD or steady state injection conditions. A customer defined calculation with different maps is possible as well as an export of primary data for further evaluation. For standard metrology tasks a predefined standard enables routine measurements by only pushing one button.
- Topographic visualisation of electrically active defects or material properties at almost any production stage, allows for process optimisation and performance prediction of devices.
- Extremely versatile measurement strategies allow special investigations as well as traceability to international standards.
- Small compact bench top tool with very high measurement sensitivity facilitates fast routine measurements.