Upcoming SENTECH Seminars:
SENTECH offers an application oriented seminar on the topic “Plasma-Process-Technology” on March 9, 2017 at SENTECH in Berlin-Adlershof. Current topics such as low-damage etching in sensor technology or deep silicon etching will be in focus.→read more
For further information please download the full program here: Program Plasma Seminar.
The Institute for Microelectronics and Microsystems (CNR-IMM/1/) in Catania, Italy is using a SI PEALD LL tool with an 8-inch wafer configuration. The integration of novel high-k gate dielectrics and passivating layers on devices based on Gallium Nitride and other wide band gap semiconductors is investigated using SENTECH PEALD tool →read more