Plasma etching
Overview:
- Optoelectronics
- VCSEL’s, arrays, LED
- Microwave technology
- HBT’s, via holes
- Photonics
- Photonic crystalls
- Micro-optics
- Lens arrays, gratings
- Micromachining /MEMS
- Fluidics, sensors, deep trenches
- Nanostructures
- Quantum dots, nanowires, micropillar
- Masks
- Cr mask
- Metal films - Al stripes