Ellipsometry, Reflectometry
SENTECH’s tools for UV-VIS-NIR reflectometry, laser ellipsometry and DUV-VIS-NIR-MIR spectroscopic ellipsometry are applied to measure:
List of materials data available
- Film thickness
- Thickness of each film in a layer stack
- Refractive index
- Absorption index (extinction coefficient)
- Anisotropy (uniaxial, biaxial) of materials, films and layer stacks
- Reflectance
- Transmittance
- Materials composition, band gap
- Alloys
- Phase and state of solids
- Crystal damage
- Porosity
- Surface roughness
- Interface roughness
- Index gradient
- Chemical composition
- Charge carrier concentration, mobility and conductivity
- Depolarization
- Uniformity of films and layer stacks
- Film thickness and refractive index of AR coatings on solar silicon
- Film growth rate
List of materials data available