Projects

IOMM – Innovative opto-micromechanic measurement techniques
SENTECH takes part in a project for the development of a new 3D measurement procedure for the assessment of etch processes, periodical and non-periodical micro-profiles, and errors in microsystems.

(VDI/VDE FKZ 16SV1893)
www.mstonline.de/foerderung/projektliste/detail_html?vb_nr=V3MPT020

MOPAL – Modular optical analysis system
SENTECH takes part in a project for development and test of a microsystem based optical analysis tool for spectroscopic applications.

(VDI/VDE FKZ 16SV1860)
www.mstonline.de/foerderung/projektliste/liste/detail_html?vb_nr=V3000